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Browsing by Author Mubarek, H.A.W.E
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
2005-03-21
Effect of fluorine implantation dose on boron transient enhanced diffusion and boron thermal diffusion in Si/sub 1-x/Ge/sub x/
Mubarek, H.A.W.E
;
Karunaratne, M. S. A
;
Bonar, J. M
;
Dilliway, G. D
;
Wang, Y.
;
Hemment, P. L. F
