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Faculty of Engineering
Department of Materials Engineering
Research Papers - Department of Materials Engineering
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Issue Date
Title
Author(s)
2005-03-21
Effect of fluorine implantation dose on boron transient enhanced diffusion and boron thermal diffusion in Si/sub 1-x/Ge/sub x
Mubarek, HAW El
;
Bonar, J M
;
Dilliway, G D
;
Wang, Y
;
Hemment, Peter L F
;
Willoughby, A F
;
Ashburn, Peter
;
Karunaratne, M. S. A
Discover
Author
1
Bonar, J M
1
Dilliway, G D
1
Karunaratne, M. S. A
1
Mubarek, HAW El
Subject
1
Fluorine
1
Heterojunction bipolar transistors
1
Ion implantation
1
Mass spectroscopy
1
Silicon alloys
Date issued
1
2005
Has File(s)
1
true