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Faculty of Engineering
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Research Papers - Department of Materials Engineering
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Issue Date
Title
Author(s)
2004-10-15
Effect of fluorine implantation dose on boron thermal diffusion in silicon
Mubarek, H A. W El
;
Bonar, J.M
;
Dilliway, G.D
;
Karunaratne, M. S. A
;
Willoughby, A. F
;
Wang, Y
2005-03-21
Effect of fluorine implantation dose on boron transient enhanced diffusion and boron thermal diffusion in Si/sub 1-x/Ge/sub x
Mubarek, HAW El
;
Bonar, J M
;
Dilliway, G D
;
Wang, Y
;
Hemment, Peter L F
;
Willoughby, A F
;
Ashburn, Peter
;
Karunaratne, M. S. A
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Author
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Ashburn, Peter
1
Bonar, J M
1
Bonar, J.M
1
Dilliway, G D
1
Dilliway, G.D
1
Hemment, Peter L F
1
Mubarek, H A. W El
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Mubarek, HAW El
1
Willoughby, A F
1
Willoughby, A. F
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Subject
1
Boron
1
Diffusion processes
1
Electron microscopy
1
Fluorine
1
fluorine implantation
1
Germanium alloys
1
Heterojunction bipolar transistors
1
Ion implantation
1
Mass spectroscopy
1
silicon
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Date issued
1
2004
1
2005
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