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Issue Date
Title
Author(s)
2005-03-21
Effect of fluorine implantation dose on boron transient enhanced diffusion and boron thermal diffusion in Si/sub 1-x/Ge/sub x/
Mubarek, H.A.W.E
;
Karunaratne, M. S. A
;
Bonar, J. M
;
Dilliway, G. D
;
Wang, Y.
;
Hemment, P. L. F
Discover
Author
1
Bonar, J. M
1
Dilliway, G. D
1
Hemment, P. L. F
1
Karunaratne, M. S. A
1
Mubarek, H.A.W.E
1
Wang, Y.
Subject
1
boron thermal diffusion
1
boron transient
1
Diffusion processes
Date issued
1
2005